electrolab.com/html/wafer_prober.html

If you had one of these linear reluctance stages for XY
you would have a greater print area, and better XY accuracy as the linear reluctance motor does not wear like lead screws and belts. This is why the technology
became widely used for probing IC wafers because any drift on positioning was unacceptable.
I think you could find some of these XY setups for cheap as these probers are obsolete (4-6" wafers and now the wafers are 12").