These tools are part of a 300mm suite available from Brooks to help you keep your fab up and running with minimum downtime. Brooks Automation creates manufacturing efficiency and accelerates profitability.

Product Video for:

LP3004 300mm Load Port Checker
RC3003 300mm Robotic Alignment Tool
EL-Series Next Generation Electronic Level Wafer

LP3004 300mm Load Port Checker
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The fastest method of aligning and checking load ports.
Inspects 16 parameters for load port alignment using a report card screen and real-time graphic display screens.
LP3004 helps solve problems by identifying the root cause.

Benefits:
Ease of use
Increased MTBF
Reduced MTTR
Reduced finger-pointing regarding automation issues
Improved fab throughput

The LP3004 keeps your fab up and running.

RC3003 300mm Robotic Alignment Tool
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5X faster than eyeball alignments
Helps eliminate wafer scratching
Improves wafer handling by utilizing optical non-contact measurement sensors to analyze robotic motion.

EL-Series Next Generation Electronic Level Wafer
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This high-resolution, high accuracy and versatile tool is designed to match the geometry and weight of a silicon wafer.
It is the ideal tool for keeping equipment "on the level".

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