1. These tools are part of a 300mm suite available from Brooks to help you keep your fab up and running with minimum downtime. Brooks Automation creates manufacturing efficiency and accelerates profitability.

    Product Video for:

    LP3004 300mm Load Port Checker
    RC3003 300mm Robotic Alignment Tool
    EL-Series Next Generation Electronic Level Wafer

    LP3004 300mm Load Port Checker
    The fastest method of aligning and checking load ports.
    Inspects 16 parameters for load port alignment using a report card screen and real-time graphic display screens.
    LP3004 helps solve problems by identifying the root cause.

    Ease of use
    Increased MTBF
    Reduced MTTR
    Reduced finger-pointing regarding automation issues
    Improved fab throughput

    The LP3004 keeps your fab up and running.

    RC3003 300mm Robotic Alignment Tool
    5X faster than eyeball alignments
    Helps eliminate wafer scratching
    Improves wafer handling by utilizing optical non-contact measurement sensors to analyze robotic motion.

    EL-Series Next Generation Electronic Level Wafer
    This high-resolution, high accuracy and versatile tool is designed to match the geometry and weight of a silicon wafer.
    It is the ideal tool for keeping equipment "on the level".

    # vimeo.com/80017169 Uploaded 670 Plays 0 Comments
  2. The MPO-1501 150mm SMIF Reticle Pod Opener provides precision manual opening and closing of 150mm wafer and reticle SMIF pods. Place it on, or mount to, work benches, WIP racks, or carts. Ergonomic in design and use, the MPO-1501 is a perfect addition to your fab.

    Music: Edge Of The Dream by Peter Cora (larkfall.co.uk/)

    # vimeo.com/80019088 Uploaded 313 Plays 0 Comments
  3. Quickly inspect 150mm cassettes and determine whether they are dimensionally within specifications.
    Determine whether cassettes are warped and need to be removed from the fab.
    Use on any table top.
    Check various dimensions on the cassette.
    Inspect the inner and outer dimensions of the slots.
    Simple pass or fail indicator lights.
    Cassettes of various types are inspected in this demonstration.

    # vimeo.com/80019089 Uploaded 155 Plays 0 Comments
  4. Placed on any table top. Used to dimensionally inspect wafer cassettes to determine whether they are within or out of tolerance.

    Number of features on the cassette are inspected. Has a series of microswitches and geometric features are used to perform the inspection

    Inspects the following:

    track area
    H-bar region on the track of the cassette
    overall length
    inside and outside width
    the warp of the track
    the centering feature
    overall flatness and squareness

    H-bar surface features inspected:

    Dimensions of the registration feature
    contact points with the cassette platform
    overall flatness and squareness

    These are the critical dimensions on the cassette that most commonly warp over time and create handling issues.

    A light indicates pass or fail.

    Accepts various cassette styles for inspection.

    Quickly inspect all of the cassettes in the fab.

    # vimeo.com/80019090 Uploaded 169 Plays 0 Comments
  5. Allows 300mm equipment to process 200mm wafers in 200mm cassettes. No wafer transfer required.

    Uses a kinematic plate on the bottom. Register on kinematic pins i.e. on a load port.
    Bottom features planting or latching mechanisms on the load port.

    Placement of the adapter on the load port will activate the sensors on the load port.
    Placement of the cassette on the adapter will activate the placements sensors on the load port.

    AM-3006 - Universal cassette registration design is compatible with the vast majority of cassettes on the market.

    AM-3006-2-LGE - Accommodates through beam mapping.
    A wafer pushing mechanism at the rear allows you to push the wafers forward and partially out of the cassette exposing the front edge of the wafers to the mapping.

    # vimeo.com/80017170 Uploaded 356 Plays 0 Comments

Semiconductor Alignment & Calibration Tools

Brooks Automation PRO

150mm, 200mm, 300mm alignment and calibration tools.

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