1. Brooks expertise in cryopump technology is clear. We are the #1 market leader in automation and cryogenics for semiconductor manufacturing.

    Our customer relationships are strong with over 200 OEM customers. Our products enable precise reliable handling of sensitive materials in controlled environments. Over the past 40 years, we have been the leader in cryopump technology and innovation - from the first cryopumps for semiconductor manufacturing to the first smart pumps and variable speed compressors.

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Brooks Automation Cryogenics

Brooks Automation PRO

Cryopumps, compressors and cryochillers for semiconductor automation and industrial manufacturing.

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